This course aims to give to students an introduction to the Design of Microsystems. A particular focus is given to the use of CAD tools, for the simulation of micro and nanosystems, targeting the design of optimised devices. Starting from basic concepts about microsystems and their multi-physical modeling, the course develops both behavioral modeling and the Finite Element description of structural and functional parts (FEM, Finite Element Modeling) of a microsystem. For both modeling approaches the main CAD tools available are described and used (Matlab/Simulink for behavioral, Comsol for FEM modeling), extracting the relevant project parameters, first for analysis and optimisation, then for system synthesis and integration. An overview of examples of the main applications of micro and nanodevices is given, and a project methodology capable of operating on different domains is taught. Teaching is mainly addressed to students interested in the aspects of design and implementation of micro and nano-scale devices.

- Use of CAD tools for MEMS modeling, analysis and optimisation; - MEMS design basics and methodologies; - Professional approach to the design of MEMS-based applications; - Development of knowledge over different physical domains, other then electrical one (as mechanical, thermal, magnetic, optic, fluidic, ...) and in particular the skill of connecting them together for implementing transduction systems (sensors and actuators for example), and then interfacing and integrating the different parts; - Ability to apply the knowledge gained in a research and/or industrial framework, understanding capability and skills in solving problems related to the design, simulation and implementation of microsystems also applied to new or unfamiliar issues or entered into application contexts broader and more interdisciplinary than the engineering sector (medicine, environmental monitoring, food, ...); - Ability to integrate technical knowledge and to manage the complexity of MEMS design, evaluating its quality and robustness, its implementation and feasibility, choosing the most efficient solutions from the available options; - Ability to communicate in a clear and unambiguous way technical aspects relating to the design of microsystems, both in writing and oral form and to both specialists and non-specialists; - Development of self-learning skills to allow the student to continue to learn autonomously new techniques and design methodologies for microsystems, not necessarily explained and described during the course.

- Basic knowledge about differential equations and solution methodologies - Elementary physics (mechanics, thermodynamics, wave optics, elements of structure of matter) - Basic elements of electronics and electronic devices

- Introduction to the modeling and the use of CAD for microsystems (1 ECTS) - Modeling and interaction between different physical domains (1 ECTS) - Finite Element Modeling, introduction to COMSOL (1 ECTS) - Guided Development in laboratory of some examples of microsystems (1 ECTS) - Self-Development and design of a microsystem, with related models and simulations (2 ECTS)

The course is structured with an initial part where the basic concepts of MEMS modeling are introduced. Then the needed knowledge for using MEMS CAD tools is given, passing to the second part of the course where laboratory hand-on sessions will be carried out by the students, with the tutorship of the professors present in the lab. Aim of the hands-on is to learn practical skills to design and multi-physics simulation. Students have to design a simple MEMS device, preparing for final assessment a tutorial related to a specific chosen application.

- Material (slides) provided by the Teacher - eLearning material based on the European project NanoEl Asia (http://nanoel-asia.eu). Access credentials will be given during the course - Stephen D. Senturia, "Microsystem Design", Kluwer Academic Publishers

Modalità di esame: Prova scritta tramite PC con l'utilizzo della piattaforma di ateneo; Elaborato progettuale individuale;

The remote written exam will give a maximum of 30/30. For obtaining the Laude it is mandatory to do the Project that will add a maximum of 3 points to the mark. For obtaining the Laude the student must obtain 30/30 of the written exam and 3 points for the project.

Modalità di esame: Prova scritta tramite PC con l'utilizzo della piattaforma di ateneo; Elaborato progettuale individuale;

The remote written exam will give a maximum of 30/30. For obtaining the Laude it is mandatory to do the Project that will add a maximum of 3 points to the mark. For obtaining the Laude the student must obtain 30/30 of the written exam and 3 points for the project.