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Technology for Nanoelectronic Systems & Nanoelectronic Systems

01UCZPE

A.A. 2023/24

2022/23

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

The aim of the course is to provide the theoretical basics to study materials and technologies for the design and the fabrication of microelectronic devices, micro and nanostructures and microsystems, with particular emphasis on applications in the ICT area. The course is focused around three main topics advanced FET transistor (FinFET, Tunnel FET, Gate All Around FET), post-transistor emerging technologies (Molecular and Atomic Devices, Magnetic Memories and Logic Devices, Resistive Memories) and microsystems (MEMS). The course of Nanoelectronic Systems is focused on the description of these systems and how they work, while the course of Technology for Nanoelectronic Systems describe the fabrication process of such systems. This course plays a central role in the development of an Engineer expert in micro and nanotechnologies, because it extensively provides the basic elements for the fabrication and design of the above mentioned systems.

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

The course provides the theoretical basics to study materials and technologies for the design and the fabrication of micro and nano systems, with particular emphasis on applications in the ICT area. The course is focused around three main topics, advanced FET transistor (FinFET, Gate All Around FET, Tunnel FET,), post-transistor emerging technologies (Molecular and Atomic Devices, Magnetic Memories and Logic Devices, Resistive Memories) and microsystems (MEMS). The course focus is on the fabrication process of such systems. This course plays a central role in the development of an Engineer expert in micro and nanotechnologies, because it extensively provides the basic elements for the fabrication and design of the above mentioned systems.

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Expected knowledge: - Development of knowledge that extends and/or reinforces the ones received from preparatory courses and allow to develop and/or apply original ideas and design methods and the development of a technological process flow for the production of nano and microsystems; - Ability to apply the knowledge gained in a research and/or industrial framework, understanding capability and skills in solving problems related to the design, modeling, simulation and implementation of nano and microsystems also applied to new technological principles or unfamiliar issues or entered into application contexts broader and more interdisciplinary than the engineering sector (medicine, environmental monitoring, food, ...); - Ability to integrate technical knowledge and to manage the complexity of the design and manufacturing process flow, to evaluate the quality and robustness of a process flow, its implementation and feasibility, choosing the most efficient solutions from the available options; - Ability to communicate in a clear and unambiguous way technical aspects relating to the design and manufacture of nano and microsystems, both in writing and oral form and to both specialists and non-specialists; - Development of self-learning skills to allow the student to continue to learn autonomously new techniques and design methodologies and fabrication techniques for nano and micro and nano systems, not necessarily explained and described during the course. Expected skills - Knowledge of the physical-chemical behaviour of materials to be used in nanosystems. - Knowledge of the basic technologies for nanostructures fabrication. - Knowledge of materials and technologies for nano and microsystems. - Ability to apply materials and technologies for the fabrication of nanostructures and nanosystems. - Knowledge of models and methodologies used for the description and the design of nanosystems. - Knowledge of methods and CAD for nanosystems design and simulation. - Ability to design component for nano and microsystems. - Knowledge of techniques and issues related to the design, fabrication and verification of nanosystems. - Ability to co-design nanosystems and standard electronic circuits.

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Expected knowledge: - Development of knowledge that extends and/or reinforces the one received from preparatory courses, allowing to develop and/or to apply original ideas and methods to the technological process flow for the production of micro and nanosystems; - Ability to apply the knowledge gained in a research and/or industrial framework, understanding capability and skills in solving problems related to the design and implementation of nano and microsystems, also applied to new technological principles or unfamiliar issues or entered into application contexts broader and more interdisciplinary than the engineering sector (medicine, environmental monitoring, food, ...); - Ability to integrate technical knowledge and to manage the complexity of the design and manufacturing process flow, to evaluate the quality and robustness of a process flow, its implementation and feasibility, choosing the most efficient solutions from the available options; - Ability to communicate in a clear and unambiguous way technical aspects relating to the design and manufacture of nano and microsystems, both in writing and oral form and to both specialists and non-specialists; - Development of self-learning skills to allow the student to continue to learn autonomously new techniques and design methodologies and fabrication techniques for nano and micro and nano systems, not necessarily explained and described during the course. Expected skills - Knowledge of the basic technologies for nanostructures fabrication. - Knowledge of materials and technologies for nano and microsystems. - Ability to apply materials and technologies for the fabrication of nanostructures and nanosystems. - Knowledge of methods and CAD for nanosystems design and simulation. - Ability to design component for nano and microsystems. - Ability to co-design nanosystems and standard electronic circuits.

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

- Elementary physics (mechanics, thermodynamics, elements of structure of matter). - Elements of electronics. - Deep knowledge of MOS systems and MOSFET devices. - Good knowledge of fabrication processes for ICT technologies. - Modelling of nanoscale devices (2D,1D). - Good knowledge of magnetism

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

- Elementary physics (mechanics, thermodynamics, elements of structure of matter). - Elements of electronics. - Good knowledge of MOS systems and MOSFET devices. - Good knowledge of fabrication processes for ICT technologies. - Good knowledge of magnetism.

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Technology for Nanoelectronic Systems --------------------------------------------------------- Technology for MOS systems: - Advanced MOS processes; - 3D integration technology; - Heterogeneous integration technology; - Simulation of process workflow for MOS systems. Technologies for nanosystems: - Atomic Layer Deposition; - Atomic Layer Etching; - Techniques for single atoms/molecules manipulation. - Self-Assembly techniques; - Nanoimprinting; - Resistive and 3D memories. Technology for microsystems Nanoelectronic Systems -----------------------------------

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Technology for MOS systems: - Advanced MOS processes: - FInFET; - Gate All Around FET; - Tunnel FET; - Interconnections; - 3D integration technology; - Heterogeneous integration technology; - Simulation of process workflow for MOS systems. Technologies for nanosystems: - Atomic Layer Deposition; - Atomic Layer Etching; - Techniques for single atoms/molecules manipulation. - Self-Assembly techniques; - Nanoimprinting; - Magnetive Memories; - Resistive and 3D memories. Technology for microsystems

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Technology for Nanoelectronic Systems --------------------------------------------------------- The course is organized in theoretical lectures and laboratory exercises. The course topics will be described considering some relevant cases of study: - FinFet/Tunnel Fet; - MEM sensors; - Molecular/Atomic circuits; - Magnetic Hard Drives; - Self-Assembled systems; - Resistive memories. For each of them will be analyzed the technological processes used for the integration in pervasive nanosystems which will be of high added values for many applications. The classes will be ONLY online for the 2020/2021 academic year. The laboratory exercises are instead focus on the simulation of the process workflow for MOS circuits. Finite element simulators able to simulate all fabrication processes used for planar circuits will be used to emulate all fabrication steps of a device. The laboratory can be done online, onsite or partially online and onsite. Nanoelectronic Systems -----------------------------------

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

The course is organized in theoretical lectures and laboratory exercises. The course topics will be described considering some relevant cases of study: - FinFet/GAA FET/Tunnel Fet; - Molecular/Atomic circuits; - Magnetic Hard Drives; - Self-Assembled systems; - Resistive memories. - MEM sensors; For each of them will be analyzed the technological processes used for the integration in pervasive nanosystems, which will be of high added values for many applications. The laboratory exercises are instead focused on the simulation of the process workflow for MOS circuits. Finite element simulators able to simulate all fabrication processes used for planar circuits will be used to emulate all fabrication steps of a device. There are 5 laboratories, the first one is guided and introduces the tool used. The other four laboratories focuses on the design and fabrication of advanced FET devices. The activity of this four laboratories is organized in such a way that students will have to autonomously design the devices. The classes and the lab will be performed in presence or blended or online, depending on sanitary emergency conditions.

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Lectures notes will be provided to the students by the teachers as an integration to the lessons.

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

The main reference manual book used is the IRDS roadmap, available on the web at https://irds.ieee.org/. The most used sections are: Process Integration Devices and Structures; Interconnects; Assembly; Emerging Research Devices. Lectures notes will be provided to the students by the teachers as an integration to the lessons. No additional books are needed, but for interested readers the following book can be used as support material. Handbook of Semiconductor Manufacturing Technology, Second Edition, Yoshio Nishi, Robert Doering, CRC Press.

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Modalitą di esame: Prova orale obbligatoria; Elaborato scritto prodotto in gruppo;

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Exam: Compulsory oral exam; Group essay;

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Gli studenti e le studentesse con disabilitą o con Disturbi Specifici di Apprendimento (DSA), oltre alla segnalazione tramite procedura informatizzata, sono invitati a comunicare anche direttamente al/la docente titolare dell'insegnamento, con un preavviso non inferiore ad una settimana dall'avvio della sessione d'esame, gli strumenti compensativi concordati con l'Unitą Special Needs, al fine di permettere al/la docente la declinazione pił idonea in riferimento alla specifica tipologia di esame.

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

Exam: Compulsory oral exam; Group essay;

Technology for Nanoelectronic Systems & Nanoelectronic Systems (Technology for Nanoelectronic Systems)

The exam consists in two parts. 1) Laboratory reports: The laboratories will require a report on each subject and will be evaluated for the final exam (25%). 2) Oral exam: The oral exam will be on the whole subject (75%). Exam rules - Laboratory reports: A single report describing all the laboratories must be delivered before the end of January. For each of the four laboratories the report must describe the design of the device complete with all the choices done, how the device was implemented within the simulation environment and the results obtained. Laboatory reports are expected to be complete and well presented and connected to the theory analyzed in the lectures. Critical thinking will be especially evaluated. Laboratory reports are evaluated over a maximum score of 30 Lode. -Oral exam: the exam is based on three to six questions on the whole subject. During the oral exam the students will be evaluated based on the following objectives: - Knowledge of the structure and fabrication of advanced MOS devices; - Knowledge of fabrication processes for beyond CMOS systems; - Knowledge of MEMS technology for sensors; - Knowledge of fabrication processes simulations tools and activities carried on during the laboratories. The oral exam is evaluated over a maximum score of 30 Lode. The final mark will be calculated using a weighted sum of the laboratory and oral part.

In addition to the message sent by the online system, students with disabilities or Specific Learning Disorders (SLD) are invited to directly inform the professor in charge of the course about the special arrangements for the exam that have been agreed with the Special Needs Unit. The professor has to be informed at least one week before the beginning of the examination session in order to provide students with the most suitable arrangements for each specific type of exam.
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