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Technology for Nanoelectronic Systems

01UDAPE

A.A. 2019/20

Course Language

English

Course degree

Master of science-level of the Bologna process in Nanotechnologies For Icts - Torino/Grenoble/Losanna

Course structure
Teaching Hours
Lezioni 54
Esercitazioni in laboratorio 6
Teachers
Teacher Status SSD h.Les h.Ex h.Lab h.Tut Years teaching
Piccinini Gianluca Professore Ordinario ING-INF/01 27 0 0 0 1
Teaching assistant
Espandi

Context
SSD CFU Activities Area context
ING-INF/01 6 B - Caratterizzanti Ingegneria elettronica
2019/20
The subject is compulsory in the study tracks of Nanotechnologies for ICTs Master. The subject is offered during the first semester of the second year and it is focused on the technological aspects of nanolectronic systems. The course is taught in English.
The subject is compulsory in the study tracks of Nanotechnologies for ICTs Master. The subject is offered during the first semester of the second year and it is focused on the technological aspects of nanolectronic systems. The course is taught in English.
- Knowledge of adavanced processes for FinFET, GAA, TFET. - Ability of using process simulation tools. - Knowledge of technologies for 3D integration. - Knowledge of technologies for heterogeneous integration. - Knowledge of the main fabrication technologies for nanometer scale systems: - molecular systems; - spintronic systems; - self-assembled systems.
- Knowledge of adavanced processes for FinFET, GAA, TFET. - Ability of using process simulation tools. - Knowledge of technologies for 3D integration. - Knowledge of technologies for heterogeneous integration. - Knowledge of the main fabrication technologies for nanometer scale systems: - molecular systems; - spintronic systems; - self-assembled systems.
Good knowledge of planar processes. Deep knowledge of MOS systems and MOSFET devices. Modelling of nanoscale devices (2D,1D). Good knowledge of magnetism
Good knowledge of planar processes. Deep knowledge of MOS systems and MOSFET devices. Modelling of nanoscale devices (2D,1D). Good knowledge of magnetism
Advanced MOS processes; 3D integration technology; Simulation of process workflow for FinFet and TunnelFet; Heterogeneous integration technology; Technologies for nanosystems: - Atomic Layer Deposition; - Atomic Layer Etching; - Self-Assembly techniques; - Nanogap fabrication; - Nanoimprinting; - Techniques for single atoms/molecules manipulation.
Advanced MOS processes; 3D integration technology; Simulation of process workflow for FinFet and TunnelFet; Heterogeneous integration technology; Technologies for nanosystems: - Atomic Layer Deposition; - Atomic Layer Etching; - Self-Assembly techniques; - Nanogap fabrication; - Nanoimprinting; - Techniques for single atoms/molecules manipulation.
The course topics will be described considering some relevant cases of study: - FinFet/Tunnel Fet; - MEM sensors; - Molecular circuits; - Magnetic RAM; - Self-Assembled systems; For each of them will be analyzed the technological processes used for the integration in pervasive nanosystems which will be of high added values for many applications.
The course topics will be described considering some relevant cases of study: - FinFet/Tunnel Fet; - MEM sensors; - Molecular circuits; - Magnetic RAM; - Self-Assembled systems; For each of them will be analyzed the technological processes used for the integration in pervasive nanosystems which will be of high added values for many applications.
ModalitÓ di esame: prova scritta; prova orale obbligatoria;
The exam is organized: 1) a brief (40 minutes) closed book written section where 7 questions with open answer (max. 100 words) will enable the student to go on the exam if at least 4/7 answers will be right. This section does not contribute to the final score; 2) a 30 minutes oral exam on the whole subjects (classes and practises) will be evaluated in /30.
Exam: written test; compulsory oral exam;
The exam is organized: 1) a brief (40 minutes) closed book written section where 7 questions with open answer (max. 100 words) will enable the student to go on the exam if at least 4/7 answers will be right. This section does not contribute to the final score; 2) a 30 minutes oral exam on the whole subjects (classes and practises) will be evaluated in /30.


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