PERIODO: SETTEMBRE 2017

il corso sarà tenuto dal prof Philippe RENAUD - EPFL di Losanna

The course will cover the scaling of MEMS (Micro_electro-Mechanical System) devices, including mechanical, thermal, electrostatic, electromagnetic and microfluidic aspects, with particular emphasis on nanofluidics phenomena and applications.

Tentative program
Part 1 (2 hours)
• Introduction to scaling laws:
Scaling of classical systems, breakdown in scaling, quantum breakdown.
• Mechanics:
Lumped modeling, mechanical noise, surface forces
Part 2 (3 hours)
• Thermal scaling:
Heat transfer, dynamics, breakdown, electrothermal actuators
• Electrostatics:
Electrostatic actuators, electrostatic breakdown
• Q&A
Part 3 (2 hours)
• Electromagnetics scaling:
Coils and inductors, electromagnetic actuators, micromagnetics
• Fluidics scaling:
Liquid flow, gas flow, squeeze film effects.
Part 4 (3 hours)
• Fluidics scaling:
Diffusion-mixing, surface tension, electrowetting,
• Electrokinetics:
dielectrophresis, MHD, electroosmosis, capillary electrophoresis
• Nanofluidics
Concentration polarization, molecular sieving
• Q&A

calendario:

Mercoledì 06/09 ore 10 - 12 Aula Perucca
Giovedì 07/09 ore 10 - 13 Aula Perucca
Lunedì 11/09 ore 10 - 12 Aula A1 Disat
Martedì 12/09 ore 10 - 13 Sala Didattica Disat