The course aims to develop the basic knowledge of Micro&Nano Electro Mechanical Systems (MEMS and NEMS) for their various applications, with a final special focus on Medicine and Biomedical Engineering. Fabrication processes are reviewed and studied with details, giving emphasis to more specific topics as MicroFluidics, Packaging and BioMolecule integration in micro and nanostructures, produced with various materials, as silicon, glass, plastics and polymeric substrates. Industrial applications are presented from (bio)sensors, and their transduction techniques, up to systems for (bio)molecular analysis. Particular emphasis is given to practical and design aspects, and the student can use CAD tools for the application of acquired knowledge and the design of a simple micro/nano system. Inside the course, seminars held by experts from different fields of science and industrial applications are organised.

The student has the possibility to learn, apply and extend the knowledge about micro-nano technologies and their applications. The work during the course mixes theoretical aspects with the introduction to practical design methodologies. One of main training tasks consists in giving to the students the necessary basic knowledges for the design of micro and nano structures.

Basic knowledge of physics of materials and chemistry, as acquired in the general study track.

After a general introduction to micro and nano systems, the technologies for the design and the implementation of microelectronic devices are described, as technological starting point. Then the focus moves to the technological evolution from which the solutions for the production of micro and nano systems were born. The main topics are: - basic concepts of techniques and materials for micro and nano systems; - the specific approaches for implementing biological applications, as for example microfluidics; - an introduction to the design flow and the CAD instruments available on the market; - the study of applications, with particular focus on (bio)sensors; - study and development of more complex systems based on micro-nano devices.

After a general introduction to micro and nano systems, the technologies for the design and the implementation of microelectronic devices are described, as technological starting point. Then the focus moves to the technological evolution from which the solutions for the production of micro and nano systems were born. The main topics are: - basic concepts of techniques and materials for micro and nano systems; - the specific approaches for implementing biological applications, as for example microfluidics; - an introduction to the design flow and the CAD instruments available on the market; - the study of applications, with particular focus on (bio)sensors; - study and development of more complex systems based on micro-nano devices.

On the "Portale della Didattica" will be downloadable: - The course slides - Application examples and videos related to course topics. Useful books: - Stephen D.Senturia, Microsytems Design, Kluwer Academic Publishers - S.M.Sze, Semiconductor Sensors, John Wiley & Sons - S.Carrara, Bio/CMOS Interfaces and Co-Design, Springer - D. Demarchi, A. Tagliaferro. Carbon for sensing devices, Springer

Modalità di esame: Prova scritta (in aula); Progetto individuale;

Exam: Written test; Individual project;

... The assessment is based on a mandatory written examination (up to 26 points), where the technologies of micro&nano systems presented during the course are assessed. An optional work can be done preparing a report (up to 4 points) on a detailed study of some devices and aspects related to micro and nano technologies, prepared and chose by the students. The marks are based on the acquired competences and on the autonomy demonstrated by the student.

Gli studenti e le studentesse con disabilità o con Disturbi Specifici di Apprendimento (DSA), oltre alla segnalazione tramite procedura informatizzata, sono invitati a comunicare anche direttamente al/la docente titolare dell'insegnamento, con un preavviso non inferiore ad una settimana dall'avvio della sessione d'esame, gli strumenti compensativi concordati con l'Unità Special Needs, al fine di permettere al/la docente la declinazione più idonea in riferimento alla specifica tipologia di esame.