The course aims to develop the basic knowledge of Micro&Nano Electro Mechanical Systems (MEMS and NEMS) for their various applications, with a final special focus on Medicine and Biomedical Engineering. Fabrication processes are reviewed and studied with details, giving emphasis to more specific topics as MicroFluidics, Packaging and BioMolecule integration in micro and nanostructures, produced with various materials, as silicon, glass, plastics and polymeric substrates. Industrial applications are presented from (bio)sensors, and their transduction techniques, up to systems for (bio)molecular analysis. Particular emphasis is given to practical and design aspects, and the student can use CAD tools for the application of acquired knowledge and the design of a simple micro/nano system. Inside the course, seminars held by experts from different fields of science and industrial applications are organised.

The student has the possibility to learn, apply and extend the knowledge about micro-nano technologies and their applications. The work during the course mixes theoretical aspects with the introduction to practical design methodologies. One of main training tasks consists in giving to the students the necessary basic knowledges for the design of micro and nano structures.

Basic knowledge of physics of materials and chemistry, as acquired in the general study track.

After a general introduction to micro and nano systems, the technologies for the design and the implementation of microelectronic devices are described, as technological starting point. Then the focus moves to the technological evolution from which the solutions for the production of micro and nano systems were born. The main topics are: - basic concepts of techniques and materials for micro and nano systems; - the specific approaches for implementing biological applications, as for example microfluidics; - an introduction to the design flow and the CAD instruments available on the market; - the study of applications, with particular focus on (bio)sensors; - study and development of more complex systems based on micro-nano devices.

After a general introduction to micro and nano systems, the technologies for the design and the implementation of microelectronic devices are described, as technological starting point. Then the focus moves to the technological evolution from which the solutions for the production of micro and nano systems were born. The main topics are: - basic concepts of techniques and materials for micro and nano systems; - the specific approaches for implementing biological applications, as for example microfluidics; - an introduction to the design flow and the CAD instruments available on the market; - the study of applications, with particular focus on (bio)sensors; - study and development of more complex systems based on micro-nano devices.

On the "Portale della Didattica" will be downloadable: - The course slides - Application examples and videos related to course topics. Useful books: - Stephen D.Senturia, Microsytems Design, Kluwer Academic Publishers - S.M.Sze, Semiconductor Sensors, John Wiley & Sons - S.Carrara, Bio/CMOS Interfaces and Co-Design, Springer - D. Demarchi, A. Tagliaferro. Carbon for sensing devices, Springer

Modalità di esame: Prova scritta tramite PC con l'utilizzo della piattaforma di ateneo; Elaborato progettuale individuale;

The remote written exam (mandatory) will give a maximum of 30/30. The Project (that is not mandatory) will give a maximum of 3 points that will be added to the written exam. For obtaining the Laude it is mandatory to do the Project and the student must obtain 30/30 of the written exam and 3 points for the project.

Modalità di esame: Prova scritta tramite PC con l'utilizzo della piattaforma di ateneo; Elaborato progettuale individuale;

The remote written exam (mandatory) will give a maximum of 30/30. The Project (that is not mandatory) will give a maximum of 3 points that will be added to the written exam. For obtaining the Laude it is mandatory to do the Project and the student must obtain 30/30 of the written exam and 3 points for the project.