- Use of CAD tools for MEMS modelling, analysis and optimisation; - MEMS design basics and methodologies; - Professional approach to the design of MEMS-based applications; - Development of knowledge over different physical domains, other than electrical one (as mechanical, thermal, magnetic, optic, fluidic, ...) and in particular the skill of connecting them together for implementing transduction systems (sensors and actuators for example), and then interfacing and integrating the different parts; - Ability to apply the knowledge gained in a research and/or industrial framework, understanding capability and skills in solving problems related to the design, simulation and implementation of microsystems also applied to new or unfamiliar issues or entered into application contexts broader and more interdisciplinary than the engineering sector (medicine, environmental monitoring, food, ...); - Ability to integrate technical knowledge and manage the complexity of MEMS design, evaluating its quality and robustness, its implementation and feasibility, and choosing the most efficient solutions from the available options; - Ability to communicate in a clear and unambiguous way technical aspects relating to the design of microsystems, both in writing and oral form and to both specialists and non-specialists; - Development of self-learning skills to allow the student to continue to learn autonomously new techniques and design methodologies for microsystems, not necessarily explained and described during the course.

- Basic knowledge about differential equations and solution methodologies; - Elementary physics (mechanics, thermodynamics, wave optics, elements of structure of matter) ; - Basic elements of electronics and electronic devices.

- Introduction to the modeling and the use of CAD for microsystems (1 ECTS); - Modeling and interaction between different physical domains (1 ECTS); - Finite Element Modeling, introduction to COMSOL (1 ECTS); - Guided Development in laboratory of some examples of microsystems (1 ECTS); - Self-Development and design of a microsystem, with related models and simulations (2 ECTS).

The course is structured with an initial part where the basic concepts of MEMS modelling are introduced. Then the needed knowledge for using MEMS CAD tools is given, passing to the second part of the course where laboratory hand-on sessions will be carried out by the students, with the tutorship of the professors present in the lab. The aim of the hands-on is to learn practical skills to design and multi-physics simulation. Students must be organised in working groups (3 persons maximum) and design simple MEMS devices. The students have the possibility (not mandatory), with the same lab group, to develop a specific model of a simple device, with a related final report that is evaluated for the exam and gives a maximum of 3 points, which are added to the evaluation of the written exam (mandatory).

- Material (slides) provided by the Teacher - Stephen D. Senturia, "Microsystem Design", Kluwer Academic Publishers

Exam: Written test; Group project;

The assessment is organized with a mandatory written exam that gives a maximum mark of 30/30. The students (organized in groups of no more than 3 elements) can do a not mandatory project of a simple device, with simulations based on the tools learnt during the course, and produce a final written report. This work is evaluated and can give a maximum of 3 points, which are added to the written exam mark. If the final sum is larger than 30, the "cum laude" is assigned.

In addition to the message sent by the online system, students with disabilities or Specific Learning Disorders (SLD) are invited to directly inform the professor in charge of the course about the special arrangements for the exam that have been agreed with the Special Needs Unit. The professor has to be informed at least one week before the beginning of the examination session in order to provide students with the most suitable arrangements for each specific type of exam.