Expected knowledge: • development of knowledge that extends and/or reinforces the ones received from previous Bachelor degree courses and allow to mature and/or apply original ideas and design methods to the development of a new technological process flow for the manufacturing of quantum devices; • knowledge of the physical-chemical behaviour of materials to be used in quantum devices, with a particular emphasis on the dimensional scaling effects, the behaviour at cryogenic conditions and the superconducting materials • knowledge of the basic technologies for micro and nano-scale fabrication. • knowledge of the fundamentals of cryogenic technologies. • knowledge of materials and technologies for quantum devices fabrication. • knowledge of techniques and issues related to the fabrication and verification of quantum devices. Expected competences and skills • ability to identify and select the most suited materials and technologies and to apply them for the fabrication of quantum devices, with a particular emphasis on their miniaturization and/or operation at cryogenic conditions; • ability to apply the acquired knowledge in a research and/or industrial framework, applying capability and skills in solving problems related to the design, simulation and implementation of quantum devices, also in the case of new or unfamiliar issues or into broader and more interdisciplinary application contexts than the pure engineering sector (healthcare, environmental monitoring, food, ...); • ability to integrate technical knowledge and to manage the complexity of the design and manufacturing process flow, to evaluate the quality and robustness of a process flow, its implementation and feasibility, choosing the most efficient solutions from the available options; • ability to communicate in a clear and unambiguous way technical aspects related to the design and manufacture of quantum devices, both in writing and oral form and to both specialists and non-specialists; • development of self-learning skills to allow the student to continue to learn autonomously new techniques, design methodologies and fabrication processes for quantum devices, not necessarily explained and described during the course.

• Elementary physics (mechanics, thermodynamics, wave optics, fluidics, elements of structure of matter) • Elements of modern physics • Elements of electronics (amplification, filtering, analog to digital conversion, …) • Elements of electronic devices (diode, BJT and CMOS transistor, band-gap concept, …) • Elements of chemistry and materials science (acids, bases, polymers, …) • Knowledge of the micro and nano-scale characterization techniques (SEM, TEM, AFM, Raman, XRD, XPS, profilometry, ...)

Micro and nano-scale technologies (30 h): ● Substrate preparation and crystallography (1,5 h) ● Cleanroom technology (1,5 h) ● Silicon oxidation (1,5 h) ● Epitaxy (VPE, LPE, MBE, CBE), CVD (APCVD, LPCVD, PECVD, MOCVD, ICPCVD), ALD, PVD (evaporation, sputtering), electroplating (6 h) ● Doping by diffusion and by ion implantation (3 h) ● Lithography (optical, e-beam, SPM) and advanced lithography (EUV, NIL, block copolymers, …) (4,5 h) ● Wet etching, dry etching and applications like bulk micromachining and surface micromachining (9 h) ● Wafer Bonding (1,5 h) ● Back-end technologies (1,5 h) ● Laboratory experience in cleanroom (lithography, deposition, etching, basic metrology, …) (4 h) (TO BE CONFIRMED) Cryogenic technology and superconductivity (30 h): ● Fundamentals of cryogenic technology: He4 and He3 evaporative refrigerators, closed-circuit cryocoolers, dilution refrigerators and cryogen-free technologies, properties of materials at low and ultra-low temperatures (12 h) ● Superconducting materials and technologies for quantum devices (7.5 h) ● The technology of Josephson junctions and superconducting circuits (7.5 h) ● The technology of superconducting single-photon detectors (3 h) ● Laboratory experiences at low temperatures (resistivity, Josephson effect,…) (4 h) (TO BE CONFIRMED) No distinction to be reported for the content of the course according to the fact that it will be carried out in presence or remotely.

The course consists of lectures covering the topics described in the Course Topics section, delivered by slides and the use of the blackboard (or alternative tools like graphical tablet or similar in case of remote or blended lectures). The slides will be made available to students in pdf format on the Internet Didactic Portal at the beginning of the course. Laboratory practice sessions will also be organized to allow students to become familiar with some basic technologies for devices manufacturing (e.g. lithography, basic metrology and experiences at cryogenic conditions).

The didactic material (slides for the lectures) will be distributed in pdf format by the teachers and uploaded on the Didactic Portal before the course start. Some optional additive readings (i.e. fundamental historical papers, whitepapers, review papers, manuals, …) will be made available by the teachers on the same above mentioned repository. Suggested but not mandatory additive readings and books will be specified by the teachers. Among them: - “Microsystem Technology”, W. Menz, J. Mohr, O. Paul, Wiley-VCH ed. - “Matter and Methods at Low Temperatures”, Frank Pobell, Springer Berlin Heidelberg, 2007 - “Applied Superconductivity - Handbook on Devices and Applications”, Paul Siedel (Editor), Wiley, 2015 - “Fundamentals and Frontiers of the Josephson Effect”, Francesco Tafuri (Editor), Springer Nature Switzerland AG 2019

Lecture slides;

Exam: Compulsory oral exam;

Expected learning outcomes: Understanding of the covered topics and ability to grasp the fundamental aspects of the various technologies and related materials. Ability to compare (advantages/disadvantages) the different technological tools for the manufacture of a device. Ability to compare, identify and logically use the best technological tools in order to optimize the manufacturing process of a device. Ability to build a logical path by assembling the various technological processes, for the construction of a micro, nano-scale and/or superconducting quantum device. Criteria, rules and procedures for the examination: The exam is aimed at ascertaining the knowledge of the topics listed in the official program of the course and the ability to apply the theoretical contents for the solution of simple exercises for the assembly of technological processes. The exam is only oral and may involve both open questions and short exercises. Each student will be asked two questions for each of the two parts of the program ("Micro and nano-scale technologies" and "Cryogenic technology and superconductivity") for a total of 4 questions/student. The total allotted time is 30-40 mins for each student. No books, notes or any other didactic material is allowed. The assessments are expressed in thirtieths and the exam is passed if the mark is at least 18/30. The maximum achievable mark is 30 cum laude. The type of proposed questions aims to test the student ability to understand and revision the topics covered in class lectures, with particular reference to the ability to compare similar technologies, compare results or processing parameters of technological processes or performance of different materials. The main evaluation criteria of the exam consist in the correctness, completeness and synthesis of the answers to the questions and the correctness of the employed technical language. The exam results are communicated directly to the students at the end of the exam session.

In addition to the message sent by the online system, students with disabilities or Specific Learning Disorders (SLD) are invited to directly inform the professor in charge of the course about the special arrangements for the exam that have been agreed with the Special Needs Unit. The professor has to be informed at least one week before the beginning of the examination session in order to provide students with the most suitable arrangements for each specific type of exam.