The course aims to develop the basic knowledge of Micro&Nano Electro Mechanical Systems (MEMS and NEMS) for their various applications, with a final special focus on Biology, Medicine and BioMolecular Chemistry. Fabrication processes are reviewed and studied in detail, giving emphasis to more specific topics such as MicroFluidics, Packaging and BioMolecule integration in micro and nanostructures, produced with various materials, like silicon, glass, plastics and polymeric substrates. Industrial applications are presented from (bio)sensors, and their transduction techniques, up to systems for (bio)molecular analysis.

The student has the possibility to learn, apply and extend the knowledge about micro and nanotechnologies, focusing on their application in BioMedicine. One of the main training tasks consists in giving to the students the necessary basic knowledge for the design of micro and nanostructures for bio-applications.

Basic knowledge of physics of materials and chemistry, as acquired in the general study track.

After a general introduction to micro and nano systems, the technologies for the design and the implementation of microelectronic devices are described, as technological starting point. Then the focus moves to the technological evolution from which the solutions for the production of micro and nano systems were born. The main topics are: - basic concepts of techniques and materials for micro and nano systems; - the specific approaches for implementing biological applications, as for example microfluidics; - an introduction to the design flow and the CAD instruments disposable on the market; - the study of applications, with particular focus on biosensors; - study and development of more complex systems for biomedical applications.

The course is organised with lectures and every years international experts are invited to give talks where their activities are presented, entering in details of some topics related to (Bio)Micro&Nano Systems. The structure of the course is: 1) Introduction to the Course and to the Technologies (2 ECTS): - Microelectronics Technologies - Technologies of Micro/Nano systems - Industrial Technologies for MEMS 2) Useful techniques for the realisation of Bio-MEMS/NEMS (2 CFU): - Microfluidics - Basic Concepts of Electrochemistry for Biosensors 3) Design of Bio-MEMS/NEMS (2 CFU): - Biosensors - Single (Bio)Molecule Sensors - Organs on Chips - Example of designs of (Bio)MEMS-NEMS

On the "Portale della Didattica" will be downloadable: - The course slides - Application examples and videos related to course topics. Useful books: - Stephen D.Senturia, Microsytems Design, Kluwer Academic Publishers - S.M.Sze, Semiconductor Sensors, John Wiley & Sons - S.Carrara, Bio/CMOS Interfaces and Co-Design, Springer - D. Demarchi, A. Tagliaferro. Carbon for sensing devices, Springer

Modalità di esame: Prova scritta (in aula);

Exam: Written test;

... The assessment is based on a written examination (up to 30/30 points, and possible "cum laude"), where the technologies and biomedical micro&nano systems presented during the course are assessed by some questions with open answers. The marks are based on the acquired competencies and the autonomy demonstrated by the student.

Gli studenti e le studentesse con disabilità o con Disturbi Specifici di Apprendimento (DSA), oltre alla segnalazione tramite procedura informatizzata, sono invitati a comunicare anche direttamente al/la docente titolare dell'insegnamento, con un preavviso non inferiore ad una settimana dall'avvio della sessione d'esame, gli strumenti compensativi concordati con l'Unità Special Needs, al fine di permettere al/la docente la declinazione più idonea in riferimento alla specifica tipologia di esame.