Politecnico di Torino
Anno Accademico 2017/18
CAD of semiconductor devices and processes
Corso di Laurea Magistrale in Ingegneria Elettronica (Electronic Engineering) - Torino
Corso di Laurea Magistrale in Nanotechnologies For Icts (Nanotecnologie Per Le Ict) - Torino/Grenoble/Losanna
Docente Qualifica Settore Lez Es Lab Tut Anni incarico
Goano Michele ORARIO RICEVIMENTO O2 ING-INF/01 15 0 45 0 8
SSD CFU Attivita' formative Ambiti disciplinari
ING-INF/01 6 D - A scelta dello studente A scelta dello studente
Aim of the course is to discuss the techniques used for the numerical simulation of semiconductor materials and devices, and to teach the student both to use proficiently a commercial CAD suite and to write specialized device simulation codes - critical competences for engineers expert in (opto)electronic devices and nanotechnologies. The course presents the derivation, implementation and limitations of the most important semiclassical models of electron transport in semiconductors (drift-diffusion, energy balance, hydrodynamic), and provides an introduction to quantum transport models. Particular emphasis is placed on numerical laboratories.
Risultati di apprendimento attesi
Knowledge of the semiclassical models derived from Boltzmann transport equation for the physics-based simulation of semiconductor devices, of their different application domains, and of the numerical techniques involved in their implementation.
Knowledge of the quantum transport models based on the non-equilibrium Greenís function (NEGF) formalism.
Ability to use commercial CAD programs for the physics-based simulation of semiconductor (opto)electronic devices.
Ability to implement a one-dimensional (1D) solver based on the finite-element method (FEM) for Poissonís equation in semiconductor devices.
Ability to implement a 1D FEM quantum transport simulation code based on NEGF.
Prerequisiti / Conoscenze pregresse
Basics of quantum mechanics and solid-state physics.
Operating principles of the most important electronic semiconductor devices.
Fundamentals of Matlab programming.
1. Semiclassical models for carrier transport in semiconductors: from the Boltzmann transport equation (BTE) to the hydrodynamic, energy-transport and drift-diffusion models. Numerical issues and fundamental limitations in the simulation of (opto)electronic devices with semiclassical models based on systems of partial differential equations (1 ECTS)
2. Simulation of semiconductor devices at equilibrium: implementation of a 1D FEM solver for Poissonís equation (1 ECTS)
3. Physics-based semiclassical simulation of (opto)electronic devices with commercial CAD suites (1.5 ECTS)
4. Introduction to quantum transport models. The NEGF formalism. Implementation of a 1D FEM quantum transport simulation code based on NEGF (2.5 ECTS)
Organizzazione dell'insegnamento
The theory presented in class (both with transparencies and at the blackboard) will be applied in four numerical laboratories, devoted to the implementation of simulation codes (in Matlab) or to the use of commercial physics-based CAD suites (most recently, TCAD Sentaurus by Synopsys). Each laboratory will be organized in two or more 3-hour sessions. The lab reports and the numerical codes written by the students will be graded and discussed during the oral exam.
Testi richiesti o raccomandati: letture, dispense, altro materiale didattico
Detailed week-by-week syllabus, lecture notes, and laboratory/homework assignments will be posted on the course website. Supplementary texts include:
D. Vasileska, S. M. Goodnick, and G. Klimeck, Computational Electronics. Semiclassical and Quantum Device Modeling and Simulation, CRC Press 2010.
M. Fischetti and W. G. Vandenberghe, Advanced Physics of Electron Transport in Semiconductors and Nanostructures, Springer 2016.
Criteri, regole e procedure per l'esame
Oral examination (30 minutes) focused on the reports of the numerical laboratories. The grading will take into account the quality of the lab reports, and the ability of the student to discuss the specific issues involved in each laboratory and her/his personal approach.
Orario delle lezioni
Statistiche superamento esami

Programma definitivo per l'A.A.2017/18

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