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Politecnico di Torino
Academic Year 2017/18
01NYCPE
Physics of technological processes for Micro & Nano systems and Micro & Nano systems
Master of science-level of the Bologna process in Nanotechnologies For Icts - Torino/Grenoble/Losanna
Teacher Status SSD Les Ex Lab Tut Years teaching
Graziano Mariagrazia ORARIO RICEVIMENTO A2 ING-INF/01 42 0 18 10 4
Scaltrito Luciano ORARIO RICEVIMENTO O2 ING-INF/01 60 0 0 0 8
SSD CFU Activities Area context
FIS/03
ING-INF/01
6
6
C - Affini o integrative
B - Caratterizzanti
Attivitΰ formative affini o integrative
Ingegneria elettronica
Subject fundamentals
Physics of technological processes for Micro & Nano systems
Aim of the course (2nd semester, 1st year of the National LM in Nanotechnologies for ICT) is to provide the theoretical basics to be exploited in the study of materials, technologies and design for realization of microelectronic devices, micro and nanostructures, microsystems and MEMS/NEMS (micro/nano-electro-mechanical systems), with particular emphasis on applications in the ICT area.
This course plays a central role in the development of an Engineer expert in micro an nanotechnologies, because it extensively provides the basic elements for the fabrication and design of the above mentioned devices and it is preparatory for the understanding of subsequent courses of the Laurea Magistrale.
In the course the fundamentals of technologies and material for microelectronics and microsystems and some examples of the same are treated and discussed, thus making the course specifically addressed to those students interested in the fabrication and design aspects of micro and nano-scale devices and systems.

Micro & Nano systems
Aim of the course (1st semester, 1st year of the International LM in Nanotechnologies for ICT) is to provide the theoretical basics to be exploited in the study of materials, technologies and design for realization of microelectronic devices, micro and nanostructures, microsystems and MEMS/NEMS (micro/nano-electro-mechanical systems), with particular emphasis on applications in the ICT area.
The course aims to give to the students’ skills and knowledge of principal design CAD tools and simulation of micro and nanosystems. Starting from basic concepts of microsystems, and their multi-physics modelling, the course develops both modelling and simulation at behavioural level of systems and sub-systems (BEM, behavioural modelling), and the finite element description of structural and functional parts (FEM, finite element modelling) of a microsystem.
This course plays a central role in the development of an Engineer expert in micro an nanotechnologies, because it extensively provides the basic elements for the fabrication and design of the above mentioned devices and it is preparatory for the understanding of subsequent courses of the Laurea Magistrale.
In the course the fundamentals of technologies and material for microelectronics and microsystems and some examples of the same are treated and discussed, thus making the course specifically addressed to those students interested in the fabrication and design aspects of micro and nano-scale devices.
Expected learning outcomes
Physics of technological processes for Micro & Nano systems
Expected knowledge:
• development of knowledge that extends and/or reinforces the ones received from preparatory courses and allow to develop and/or apply original ideas and design methods and the development of a technological process flow for the production of integrated circuits and microsystems;
• ability to apply the knowledge gained in a research and/or industrial framework, understanding capability and skills in solving problems related to the design, modeling, simulation and implementation of microelectronic circuits and microsystems also applied to new technological principles or unfamiliar issues or entered into application contexts broader and more interdisciplinary than the engineering sector (medicine, environmental monitoring, food, ...);
• ability to integrate technical knowledge and to manage the complexity of the design and manufacturing process flow, to evaluate the quality and robustness of a process flow, its implementation and feasibility, choosing the most efficient solutions from the available options;
• ability to communicate in a clear and unambiguous way technical aspects relating to the design and manufacture of integrated circuits and microsystems, both in writing and oral form and to both specialists and non-specialists;
• development of self-learning skills to allow the student to continue to learn autonomously new techniques and design methodologies and fabrication techniques for integrated circuits and micro and nano systems, not necessarily explained and described during the course.

Expected skills
• Knowledge of the physical-chemical behaviour of materials to be used in micro and nanotechnologies.
• Knowledge of the basic technologies for microstructure realization.
• Knowledge of materials and technologies for Microsystems and MEMS realization.
• Ability to apply materials and technologies for realization of microstructure and microsystems.
• Knowledge of models and methdologies used for the description and the design of micro and nano systems.
• Knowledge of methods and CAD for microsystem design.
• Ability to design component for microsystem and MEMS
• Knowledge of methods for the integration of MEMS/NEMS with electronic circuits
• Knowledge of techniques and issues related to the design, fabrication and verification of nanosystems.
• Ability to design integration of MEMS/NEMS and its co-design with electronic circuits

Micro & Nano systems
Expected knowledge:
• development of knowledge that extends and/or reinforces the ones received from preparatory courses and allow to develop and/or apply original ideas and design methods and the development of a technological process flow for the production of integrated circuits and microsystems;
• development of knowledge over different physical domains, other then electrical one (as mechanical, thermal, magnetic, optic, fluidic, ...) and in particular the skill of connecting them together for realizing transduction systems (sensors and actuators for example), and then interfacing and integrating the different parts;
• ability to apply the knowledge gained in a research and/or industrial framework, understanding capability and skills in solving problems related to the design, simulation and implementation of microelectronic circuits and microsystems also applied to new or unfamiliar issues or entered into application contexts broader and more interdisciplinary than the engineering sector (medicine, environmental monitoring, food, ...);
• ability to integrate technical knowledge and to manage the complexity of the design and manufacturing process flow, to evaluate the quality and robustness of a process flow, its implementation and feasibility, choosing the most efficient solutions from the available options;
• ability to communicate in a clear and unambiguous way technical aspects relating to the design and manufacture of integrated circuits and microsystems, both in writing and oral form and to both specialists and non-specialists;
• development of self-learning skills to allow the student to continue to learn autonomously new techniques and design methodologies and fabrication techniques for integrated circuits and microsystems, not necessarily explained and described during the course.

Expected skills
• Knowledge of the physical-chemical behaviour of materials to be used in micro and nanotechnologies.
• Knowledge of the basic technologies for microstructure realization.
• Knowledge of materials and technologies for Microsystems and MEMS realization.
• Ability to apply materials and technologies for realization of microstructure and microsystems.
• Knowledge of methods and CAD for microsystem design.
• Ability to design component for microsystem and MEMS
• Knowledge of methods for the integration of MEMS/NEMS with electronic circuits
• Ability to design integration of MEMS/NEMS and its co-design with electronic circuits
Prerequisites / Assumed knowledge
Physics of technological processes for Micro & Nano systems
• Elementary physics (mechanics, thermodynamics, wave optics, elements of structure of matter)
• Elements of modern physics
• Elements of electronics
• Elements of electronic devices

Micro & Nano systems
• Elementary physics (mechanics, thermodynamics, wave optics, elements of structure of matter)
• Elements of modern physics
• Elements of electronics
• Elements of electronic devices
Contents
Physics of technological processes for Micro & Nano systems
Integrated Circuits technologies (wafer preparation, cleanroom technology, silicon oxidation, epitaxy, CVD, evaporation, sputtering, electroplating, diffusion, ion implantation) (2 ECTS)
Lithographic techniques, wet etching, dry etching, back-end technologies, CMOS process flow (1,5 ECTS)
Introduction to MEMS and NEMS, bulk micromachining, surface micromachining, LIGA, wafer bonding, MEMS packaging, MEMS complementary technologies (2 ECTS)
Examples of Microsystems (micro pressure sensors, microaccelerometers, ...) (0,5 ECTS)

Basics of microsystems simulation; physical multidomain simulation (0,5 ECTS)
Elements of 'behavioural' and FEM simulation, examples and use of commercial software CAD tools and their characteristics (1 ECTS)
Module concept in micro and nano system technology (1 ECTS)
Methdos for modeling nanodevices and nanocircuits for the hyerarchical design of micro and nano systems (1,5 ECTS)
Simulation, methods for integration and test of micro and nano systems (2 ECTS)

Micro & Nano systems
Integrated Circuits technologies (wafer preparation, cleanroom technology, silicon oxidation, epitaxy, CVD, evaporation, sputtering, electroplating, diffusion, ion implantation) (2 ECTS)
Lithographic techniques, wet etching, dry etching, back-end technologies, CMOS process flow (2 ECTS)
Introduction to MEMS and NEMS, bulk micromachining, surface micromachining, LIGA, wafer bonding, MEMS packaging, MEMS complementary technologies (2 ECTS)

Introduction to the modeling and the use of CAD for microsystems (1 ECTS)
Modeling and interaction between different physical domains (1 ECTS)
FEM Descriptions, introduction to COMSOL (1 ECTS)
Examples of commercial and OpenSource CAD tools (1 ECTS)
Guided Development in the Laboratory of some examples of microsystems (1 ECTS)
Self-Development of a project of a microsystem, with related models and simulations (1 ECTS)
Delivery modes
Physics of technological processes for Micro & Nano systems
The first part of the course ("Physics of Technological Processes") consists of lectures delivered by slides and the use of the blackboard. The slides will be made available to students on the Internet Didactic Portal at the beginning of the course.
The second part of the course ("Micro and Nano systems") consists both in lectures delivered by slides and using blackboards, and of laboratories aimed at simulating, evaluating and designing single devices and micro and nano systems. The slides and laboratory material will be made available to students on the Internet Didactic Portal, and the CAD system for the laboratory exercise will be available and usable during the whole semester.

Micro & Nano systems
The first part of the course ("Physics of Technological Processes") consists of lectures delivered by slides and the use of the blackboard. The slides will be made available to students on the Internet Didactic Portal at the beginning of the course.

For the second part of the course ("CAD for Microsystems") hands-on laboratories will be realised in groups, using specific CADs for microsystems. Aim of the hands-on will be to learn practical skills to design and multi-physics simulation. Students will have to be organised in working groups (3 persons maximum) and will execute computer simulations, designing simple projects based on the topics covered during the course, reported in a written document for final assessment.
Texts, readings, handouts and other learning resources
Physics of technological processes for Micro & Nano systems
Concerning the first part of the course ("Physics of Technological Processes") the didactic material (slides for the lectures) will distributed by teachers. Suggested but not mandatory books will be specified by the teacher. Among them:
- "Microsystem Technology", W. Menz, J. Mohr, O.Paul, Wiley-VCH ed.
For the second part of the course ("Micro and Nano systems") the material (slide, scientific papers, material for the lab execution) will be available, and some books will be suggested as integration by the teacher.

Micro & Nano systems
Concerning the first part of the course ("Physics of Technological Processes") the didactic material (slides for the lectures) will distributed by teachers. Suggested but not mandatory books will be specified by the teacher. Among them:
- "Microsystem Technology", W. Menz, J. Mohr, O.Paul, Wiley-VCH ed.

For the second part of the course ("CAD for Microsystems"):
- Material (slides) provided by the Teacher
- eLearning material based on the European project EduNano (http://edunano.eu). Access credentials will be given during the course
- Stephen D. Senturia, "Microsystem Design", Kluwer Academic Publishers
- Other texts suggested, but not necessary, will be proposed in class by the Teacher
Assessment and grading criteria
Physics of technological processes for Micro & Nano systems
The exam is divided in two parts, mirroring the division in 2 parts of the course:
- The first part ("Physics of Technological Processes") involves a written and oral proof. The written exam includes both multiple-answer questions and open questions and short exercises. The total allotted time is 30 mins. No books or notes are allowed. The type of proposed questions aims to test the student ability to understand and revision the topics covered in class lectures, with particular reference to the ability to compare similar technologies, compare results or processing parameters of technological processes or performance of different materials. The oral exam lasts 15-20 minutes and it will cover all the subjects explained during the lectures. The main evaluation criteria of the exam consist in the correctness of the tests solutions, the completeness and synthesis of the responses to the open questions and the correctness of the employed technical language.
- The second part ("Micro and nano systems") requires a written proof and a project. The written part is organized in three open questions related to all the subjects discussed during the lectures and the laboratories. The time for this part is 1.5 hours. The aim of the question is to verify the student capability to undesrtand and discuss the major subjects presented, independently on the specific aspect analyzed in the project development. The evaluation criteria focus on the verification of the correctness and the in depth analysis of the suggested subjects, in the student capability to organically present it with a good degree of completeness and of details. The project (to be selected among a list of proposed subjects) consists in analyzing, designing and validating a micro and nano system among those proposed during the lectures or even other more innovative cases. The goal is to agive the student the possibility to experiment and to enlarge the knowledges and techniques studied during the lectures and the laboratories. The project evaluation requires to verify the approrpiateness of the method used, the correctness of the analysis and desing criteria, the completeness and correctness of the results, of the final repoert and of its related presentation.

Micro & Nano systems
The exam is divided in two parts, mirroring the division in 2 parts of the course:
- The first part ("Physics of Technological Processes") involves a written proof including both multiple-answer questions and open questions and short exercises. The total allotted time is 60 mins. No books or notes are allowed. The type of proposed questions aims to test the student ability to understand and revision the topics covered in class lectures, with particular reference to the ability to compare similar technologies, compare results or processing parameters of technological processes or performance of different materials. The main evaluation criteria of the exam consist in the correctness of the tests solutions, the completeness and synthesis of the responses to the open questions and the correctness of the employed technical language.
- for the second part ("CAD for Microsystems") the exam will be based on the presentation by the student of the developed project, from which will have to be demonstrated the student skills in design and in the use of the CADs for microsystems described during the course. Will be taken into special consideration the ability to develop a project with a critical and original approach, inspired by literature and products currently on the market.

Programma definitivo per l'A.A.2017/18
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